Abstract: We describe a raster-scanning display system comprised of two tilt-up micromachined polysilicon mirrors that rotate about orthogonal axes. We have demonstrated a resolution of 102 $MUL 119 pixels. The optical efficiency of our two- mirror micro-optical raster-scanning system is comparable to that of micromachined display systems developed by Texas Instruments and Silicon Light Machines. Ease of integration with on-chip light sources and lenses has the potential to reduce packaging size, complexity and cost of the display system and makes it well suited for head-mounted display applications.!8
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机译：摘要：我们描述了一种光栅扫描显示系统，该系统由两个绕正交轴旋转的向上倾斜微加工多晶硅镜组成。我们已经展示了102个$ MUL 119像素的分辨率。我们的双镜微光学光栅扫描系统的光学效率可与德州仪器（TI）和Silicon Light Machines开发的微机械显示系统相媲美。易于与片上光源和透镜集成，有可能降低显示系统的包装尺寸，复杂性和成本，使其非常适合头戴式显示应用！8
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