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首页> 外文会议>18th International IFHTSE congress >CVD of Alternated MCD and NCD Films on Cemented Carbide Inserts
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CVD of Alternated MCD and NCD Films on Cemented Carbide Inserts

机译：硬质合金刀片上交替MCD和NCD膜的CVD

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摘要

Chemical vapor deposition (CVD) diamond coating of cemented carbide cutting tools has been an alternative to increase tool-life. Experiments have shown that residual stresses produced during films growth on cemented carbide inserts significantly increases with increasing film thickness of up to 20 μm and usually leads to film delamination. In this work alternated micro- and nanocrystalline CVD diamond films have been used to relax interface stresses and to increase diamond coatings performance. Cemented carbide inserts have been submitted to a boronizing thermal diffusion treatment prior to CVD diamond films growth. After reactive heat treatment samples were submitted to subsequently chemical etching in acid and alkaline solution. The diamond films deposition was performed using hot-filament chemical vapor deposition (HFCVD) reactor with different gas concentrations for microcrystalline diamond (MCD) and nanocrystalline diamond (NCD) films growth. As a result, we present the improvement of diamond films adherence on cemented carbide inserts, evaluated by indentation and machining tests. Samples were characterized by scanning electron microscopy and energy dispersive X ray for qualitative analysis of diamond films. X-ray diffraction was used for phases identification after boronizing process. Diamond film compressive residual stresses were analyzed by Raman scattering spectroscopy.
机译：硬质合金刀具的化学气相沉积（CVD）金刚石涂层已成为延长刀具寿命的替代方法。实验表明，硬质合金刀片上的薄膜生长过程中产生的残余应力会随着薄膜厚度的增加而增加，最高可达20μm，通常会导致薄膜分层。在这项工作中，交替使用的微晶和纳米晶CVD金刚石膜已被用来缓解界面应力并提高金刚石涂层的性能。硬质合金刀片已在CVD金刚石薄膜生长之前进行了渗硼热扩散处理。反应性热处理后，样品将随后在酸和碱溶液中进行化学蚀刻。金刚石膜的沉积是使用热丝化学气相沉积（HFCVD）反应器进行的，其中微晶金刚石（MCD）和纳米晶金刚石（NCD）膜生长的气体浓度不同。结果，我们通过压痕和机加工测试评估了金刚石薄膜在硬质合金刀片上的附着力。通过扫描电子显微镜和能量色散X射线对样品进行表征，以对金刚石膜进行定性分析。 X射线衍射用于硼化后的相鉴定。通过拉曼散射光谱分析金刚石膜的压缩残余应力。

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  • 来源
    《18th International IFHTSE congress》|2010年|369-382|共14页
  • 会议地点 Rio de Janeiro(BR)
  • 作者

    Raonei Alves Campos; Andre Contin; Vladimir Jesus Trava-Airoldi; Danilo Maciel Barquete; Evaldo Jose Corat;

  • 作者单位

    LAS, Instituto Nacional de Pesquisas Espaciais-INPE, Av. dos Astronautas, 1758, B. Jardimda Granja, Sao Jose dos Campos, Sao Paulo 12227-010, Brazil;

    LAS, Institute Nacional de Pesquisas Espaciais-INPE, Av. dos Astronautas, 1758, B. Jardimda Granja, Sao Jose dos Campos, Sao Paulo 12227-010, Brazilyahoo.com.br;

    LAS, Institute Nacional de Pesquisas Espaciais-INPE, Av. dos Astronautas, 1758, B. Jardimda Granja, Sao Jose dos Campos, Sao Paulo 12227-010, Brazil;

    DCET, Universidade Estadual de Santa Cruz-UESC, Rod. Ilheus-Itabuna, Km 16,Ilheus, Bahia 45662-900, Brazil;

    LAS, Institute Nacional de Pesquisas Espaciais-INPE, Av. dos Astronautas, 1758, B.Jardim da Granja, Sao Jose dos Campos, Sao Paulo 12227-010, Brazil;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    cutting tools, HFCVD, diamond films, thermal diffusion;

    机译：切削工具，HFCVD，金刚石膜，热扩散;

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