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DESIGN OF COMPLIANT FORCE AND DISPLACEMENT AMPLIFICATION MICRO-MECHANISMS

机译:柔顺力和位移放大微机构的设计

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摘要

In many MEMS applications, it is desirable to amplify the force or displacement of an actuator or transducer. Devices that amplify force or mechanical advantage typically achieve this at the expense of displacement or geometric advantage. Likewise, devices that amplify geometric advantage do so at the expense of mechanical advantage. This paper proposes a device topology based on a four-link mechanism with compliant segments in place of hinges. Finite-element analysis and optimization were used to develop a Pareto set of solutions quantifying the force / displacement trade-off for a variety of loading conditions. Depending on these conditions, this device is capable of multiplying force inputs by as much as 23.7 and displacement inputs by as much as 588. Efficiency of these designs improves as the two objectives (mechanical and geometric advantage) are considered jointly in a multicriteria optimization problem rather than individually.
机译:在许多MEMS应用中,期望放大致动器或换能器的力或位移。放大力或机械优势的设备通常以位移或几何优势为代价来实现这一点。同样,扩大几何优势的设备这样做会牺牲机械优势。本文提出了一种基于四链接机制的设备拓扑,其中四边形段可替代铰链。使用有限元分析和优化来开发一套Pareto解决方案,以量化各种载荷条件下的力/位移权衡。根据这些条件,该设备能够将力输入乘以23.7,将位移输入乘以588。由于在多标准优化问题中同时考虑了两个目标(机械和几何优势),这些设计的效率得以提高。而不是单独。

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