Methods of selectivity improvements of semiconductor gas sensors

机译：改善半导体气体传感器选择性的方法

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In this paper, methods for selectivity improvement of semiconductor gas sensors are presented. The frequently used techniques are: temperature modulation, synthesis of new materials, designing new sensor constructions, adopting filter layers and using of sensors array. A comparison between the different methods has been made. It was concluded that the kind of sensing material and filter layer have a strong influence on the sensor parameters. The analysis has shown that the optimal detection temperature change when using multilayer gas sensors.

机译：本文提出了提高半导体气体传感器选择性的方法。常用的技术有：温度调制，合成新材料，设计新的传感器结构，采用过滤层和使用传感器阵列。已对不同方法进行了比较。结论是，传感材料和过滤层的种类对传感器参数有很大的影响。分析表明，使用多层气体传感器时，最佳检测温度会发生变化。

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来源
《2009 International Students and Young Scientists Workshop Photonics and Microsystems》|2009年|P.31-35|共5页
会议地点 Wernigerode(DE)
作者
Halek Grzegorz; Malewicz Miroslaw; Teterycz Helena;
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作者单位

Faculty of Microsystems Electronics and Photonics, Wroclaw University of Technology, Poland;

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原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
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4. Methods of selectivity improvements of semiconductor gas sensors [C] . Halek G., Malewicz M., Teterycz H. 2009 International Students and Young Scientists Workshop Photonics and Microsystems . 2009

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机译：半导体薄膜气体传感器气体选择性的改进

Methods of selectivity improvements of semiconductor gas sensors

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