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首页> 外文会议>2010 18th Iranian Conference on Electrical Engineering >A new high reliable structure of micro-electro-mechanical radial contour mode disk resonators for UHF application
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A new high reliable structure of micro-electro-mechanical radial contour mode disk resonators for UHF application

机译：用于UHF应用的新型微机电径向轮廓模式圆盘谐振器的高可靠性结构

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摘要

A new high reliable microelectromechanical radial contour mode disk resonator is demonstrated with the ability to work at UHF range and high quality factor in both vacuum and air. The hollow disk structure of resonator with a ring shape anchor makes it capable to work at higher frequencies without downscaling. The ring shape anchor, which is placed at the stress free nodal zone of resonator at the desired resonance mode, causes significantly low insertion loss and therefore high quality factor. Such an anchor seems to be more reliable than stem shape anchor reported at previous papers. The motional resistance of the resonator is decreased due to displacement of the electrodes in both inside and outside of the structure. In addition to providing simulation results, this paper formulates the resonance frequency and calculates the optimum location of the anchor. Transfer function, resonance frequency and anchor displacement versus inner radius are studied.
机译：展示了一种新型的高可靠性微机电径向轮廓模式盘谐振器，该谐振器具有在超高频范围内工作的能力以及在真空和空气中的高品质因数。具有环形锚的谐振器的中空盘结构使其能够在更高的频率下工作而不会缩小尺寸。在所需的共振模式下放置在共振器的无应力节点区域的环形锚会导致极低的插入损耗，因此会产生较高的品质因数。这种锚似乎比以前论文中报道的茎状锚更可靠。由于电极在结构内部和外部的位移，谐振器的运动阻力减小。除了提供仿真结果外，本文还制定了共振频率并计算了锚的最佳位置。研究了传递函数，共振频率和锚固位移与内半径的关系。

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