Contactless measurement of thin metallic films

机译：非接触式金属薄膜测量

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A thin layer measurement exploiting the change of complex coil impedance is a contactless method for conductive-layer diagnostics. The analysed sample is inserted into the leakage field of the coil. The coil impedance is evaluated by an electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determining the layer thickness or sheet resistance.

机译：利用复数线圈阻抗的变化进行的薄层测量是用于导电层诊断的非接触式方法。被分析的样品被插入线圈的泄漏场。线圈阻抗由电子系统评估。确定层厚度或薄层电阻的一种特殊算法可确保对测量进行明确评估。

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来源
《2010 27th International Conference on Microelectronics Proceedings》|2010年|p.111-114|共4页
会议地点 Nis(RS);Nis(RS)
作者
Papez V.; Papezova S.;
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作者单位

Department of Electrotechnology, CTU in Prague, Faculty of Electrical Engineering, Technicka 2, 166 27 Prague 6, Czech Republic;

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正文语种 eng
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Contactless measurement of thin metallic films

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