Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics

机译：用于硅集成光子的电介质嵌入硅纳米晶体的生长

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Silicon integrated photonics has attracted much attentions recently because of the available of silicon-based quantum devices and optical components. Dielectric films with embedded silicon nanocrystallites (Si-NCs) have been recognized as one of the promising light-emitting materials for this purpose. This work reviews some attempts reported recently for preparing dielectric-embedded Si-NCs based on the conventional CMOS processes. The mechanism for the Si-NCs formation is discussed. The material and light emitting properties of the as-prepared Si-NC embedded in dielectric films are studied in detail.

机译：由于硅基量子器件和光学组件的出现，硅集成光子学最近引起了很多关注。具有嵌入式硅纳米晶体（Si-NC）的介电膜已被公认为是用于此目的的有前途的发光材料之一。这项工作回顾了最近报道的基于常规CMOS工艺制备电介质嵌入Si-NC的一些尝试。讨论了Si-NC形成的机理。详细研究了嵌入介电膜中的已制备Si-NC的材料和发光特性。

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《2010 27th International Conference on Microelectronics Proceedings》|2010年|p.15-19|共5页
会议地点 Nis(RS);Nis(RS)
作者
Wong H.; Wong C. K.;
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作者单位

Department of Electronic Engineering, IC Design Laboratory, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong;

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原文格式 PDF
正文语种 eng
中图分类微模组件;
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2. Expanding the Silicon Photonics Portfolio With Silicon Nitride Photonic Integrated Circuits [J] . Abdul Rahim, Eva Ryckeboer, Ananth Z. Subramanian, Journal of Lightwave Technology . 2017,第4期

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3. Controlled growth of silicon nanocrystallites in silicon oxide matrix using 150 MeV Ag ion irradiation [J] . Prajakta S. Chaudhari, Tejashree M. Bhave, Renu Pasricha, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2005,第3期

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4. Growth of Dielectric-Embedded Silicon Nanocrystallites for Silicon Integrated Photonics [C] . H. Wong, C. K. Wong International Conference on Microelectronics . 2010

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6. Heterogeneously-Integrated Optical Phase Shifters for Next-Generation Modulators and Switches on a Silicon Photonics Platform: A Review [O] . Younghyun Kim, Jae-Hoon Han, Daehwan Ahn, 2021

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8. 3D Active Photonic Crystal Devices for Integrated Photonics and Silicon Photonics [R] . Fleming, J. G., El-Kady, I. F., Subramania, G. S., 2005

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Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics

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