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Reliability of MEMS: Effects of different stress conditions and mechanical fatigue failure detection

机译:MEMS的可靠性:不同应力条件和机械疲劳失效检测的影响

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The mechanical fatigue behavior of gold microbeams is analyzed. Dedicated devices have been designed and built able to produce alternate loading on gold specimens; the electrostatic actuation is used as driving force. Gold beams are tested under both bending and tensile alternate loadings. Results were used to plot S-N curves and fatigue Goodman-Smith diagram in order to estimate the fatigue limit of the material in presence of mean and alternate stress conditions. The surface topography evolution is studied and failure modes are discussed.
机译:分析了金微束的机械疲劳行为。专用设备的设计和制造能够在金标本上产生交替的载荷。静电驱动用作驱动力。金梁在弯曲和拉伸交替载荷下均经过测试。结果用于绘制S-N曲线和疲劳Goodman-Smith图,以估计在平均应力和交替应力条件下材料的疲劳极限。研究了表面形貌的演变并讨论了破坏模式。

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