Design principles and sensitivity analysis of MEMS cantilever sensors

机译：MEMS悬臂梁传感器的设计原理和灵敏度分析

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摘要

The aim of this work is to establish design principles and model equations for analysing sensitivity of MEMS cantilever sensors. Sensitivity and quality factor were estimated to be the most important parameters for MEMS cantilever sensors.

机译：这项工作的目的是建立用于分析MEMS悬臂传感器灵敏度的设计原理和模型方程式。估计灵敏度和品质因数是MEMS悬臂传感器的最重要参数。

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来源
《2010 Proceedings of 6th International Conference on Perspective Technologies and Methods in MEMS Design》|2010年|p.230-232|共3页
会议地点 Lviv(UA);Lviv(UA)
作者
Matviykiv Oleh; Lobur Mykhaylo;
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作者单位

CADS Department, Lviv Polytechnic National University, 12 S. Bandery Str., 79013, UKRAINE;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电机;
关键词
Cantilever sensor; Design principles; Sensitivity analysis;

机译：悬臂梁传感器;设计原则;灵敏度分析;

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4. Design Principles and Sensitivity Analysis of MEMS Cantilever Sensors [C] . Oleh Matviykiv, Mykhaylo Lobur International Conference on Perspective Technologies and Methods in Micro-electromechanical Systems Design . 2010

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Design principles and sensitivity analysis of MEMS cantilever sensors

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