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首页> 外文会议>2012 38th IEEE Photovoltaic Specialists Conference. >Open-atmosphere structural depth profiling of multilayer samples of photovoltaic interest using laser-induced plasma spectrometry
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Open-atmosphere structural depth profiling of multilayer samples of photovoltaic interest using laser-induced plasma spectrometry

机译：使用激光诱导等离子体光谱法研究光伏感兴趣的多层样品的大气层结构深度剖析

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摘要

The present work aims to assess Laser-Induced Plasma Spectrometry (LIPS) as a tool for the characterization of photovoltaic materials. Despite being a well-established technique with applications to many scientific and industrial fields, so far LIPS is little known to the photovoltaic scientific community. The technique allows the rapid characterization of layered samples without sample preparation, in open atmosphere and in real time. In this paper, we assess LIPS ability for the determination of elements that are difficult to analyze by other broadly used techniques, or for producing analytical information from very low-concentration elements. The results of the LIPS characterization of two different samples are presented: 1) a 90 nm, Al-doped ZnO layer deposited on a Si substrate by RF sputtering and 2) a Te-doped GaInP layer grown on GaAs by Metalorganic Vapor Phase Epitaxy. For both cases, the depth profile of the constituent and dopant elements is reported along with details of the experimental setup and the optimization of key parameters. It is remarkable that the longest time of analysis was ∼10 s, what, in conjunction with the other characteristics mentioned, makes of LIPS an appealing technique for rapid screening or quality control whether at the lab or at the production line.
机译：本工作旨在评估激光诱导等离子体光谱法（LIPS），作为表征光伏材料的工具。尽管LIPS是已在许多科学和工业领域中应用的成熟技术，但迄今为止，光伏科学界对LIPS的了解还很少。该技术可以在露天环境中实时地对层状样品进行快速表征，而无需样品制备。在本文中，我们评估了LIPS用于确定其他广泛使用的技术难以分析的元素或从浓度极低的元素产生分析信息的能力。给出了两种不同样品的LIPS表征结果：1）通过RF溅射在Si衬底上沉积90 nm的Al掺杂的ZnO层； 2）通过金属有机气相外延在GaAs上生长的Te掺杂的GaInP层。对于这两种情况，都报告了组成元素和掺杂元素的深度分布以及实​​验设置和关键参数优化的详细信息。值得注意的是，最长的分析时间约为10 s，结合所提到的其他特性，LIPS成为在实验室或生产线进行快速筛选或质量控制的诱人技术。

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