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Breakdown behaviour of sub-millimetre air gaps under alternating voltage

机译:交流电压下亚毫米气隙的击穿行为

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Experimental results leading to breakdown voltage (BDV) measurements conducted with blade-blade, hemisphere-hemisphere and needle-plane electrode configuration in air at STP have been reported in this paper. The applied voltage was 50Hz AC, the electrode material effect on the BDV's was studied in the needle-plane configuration by changing the plane electrode material. Electric field plots for various electrode configurations have been obtained by FEM software package. The results indicate that the overall breakdown strength of the gap in the 100μm to 1000μm gap range shows a marginal increase up to 400 μm and increases as we approach 100 μm irrespective of the geometry. The variations in the spread as we approach lower limit of 100μm is attributed to the electrode configuration and/or electrode material. Further work is in progress to study the pre-breakdown behavior. The results are expected to impact MEMS technology.
机译:本文报道了在STP空气中使用叶片-叶片,半球-半球和针面电极配置进行击穿电压(BDV)测量的实验结果。施加的电压为50Hz AC,通过改变平面电极材料在针平面结构中研究了电极材料对BDV的影响。通过FEM软件包可以获得各种电极配置的电场图。结果表明,在100μm至1000μm的间隙范围内,间隙的整体击穿强度显示边际增加到400μm,并且随着几何形状的增加,随着接近100μm的增加。当我们接近100μm的下限时,扩散的变化归因于电极配置和/或电极材料。进一步的工作正在进行中,以研究分解前的行为。预期结果会影响MEMS技术。

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