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首页> 外文会议>2014 9th International Microsystems, Packaging, Assembly and Circuits Technology Conference: Challenges of Change - Shaping the Future, 16th International Conference on Electronic Materials and packaging >Design, simulation and fabrication of MEMS Lorentz force sensor
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Design, simulation and fabrication of MEMS Lorentz force sensor

机译：MEMS Lorentz力传感器的设计，仿真和制造

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摘要

This work deals with the MEMS electronic compass (e-compass) with the novel electrical signal decouple mechanism. The proposed e-compass includes of a resonant Lorentz-force magnetic sensor and a capacitive accelerometer. The accelerometer and magnetic sensor use the same mechanical structure to detect the acceleration and magnetic field. The corresponding readout circuits are designed and implemented by the standard 0.25um CMOS process. An equivalently diode-capacitor MEMS mechanical structure is proposed to suppress unexpected electrical AC and DC coupling. The prototype of the proposed sensor is with resonant frequency about 19.428 kHz and mechanical quality factor about 500. The preliminary results show that the output sensitivity is about 128 mV/Gauss and the corresponding R2-linearity is 0.9982 under current 2.39mA.
机译：这项工作涉及具有新型电信号解耦机制的MEMS电子罗盘（电子罗盘）。拟议的电子罗盘包括谐振洛伦兹力磁传感器和电容式加速度计。加速度计和磁传感器使用相同的机械结构来检测加速度和磁场。相应的读出电路是通过标准0.25um CMOS工艺设计和实现的。提出了一种等效的二极管电容器MEMS机械结构，以抑制意想不到的交流和直流电耦合。该传感器的原型谐振频率约为19.428 kHz，机械品质因数约为500。初步结果表明，在电流2.39mA下，输出灵敏度约为128 mV / Gauss，相应的R2线性为0.9982。

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