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首页> 外文会议>2014 International Symposium on Optomechatronic Technologies >Actuated MOEMS Micro-Mirror Based on PMN PT Piezoelectric Material
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Actuated MOEMS Micro-Mirror Based on PMN PT Piezoelectric Material

机译：PMN PT压电材料驱动的MOEMS微镜

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摘要

This paper investigates the use of a PMN-PT [001] piezoelectric actuator to be integrated in smart Micro-Opto-Electrical-Mechanicals Systems (MOEMS). Unlike most piezoelectric materials, PMN-PT [001] can generate large-stroke out-of-plane displacement. This is due to its very high longitudinal piezoelectric coefficient of up to 4500pm/V. After an introduction on MOEMS actuation and a short description of the Reconfigurable Free Space Micro-Optical Bench (RFS-MoB) in which the studied actuator may be included is presented, a bulk actuator is proposed. FEM simulations are then presented highlighting some tradeoffs: increased displacement with the reduction in size while decreasing the optical aberration. It was observed that for actuators with a smaller surface than 800×800μm and 200μm thick, displacement larger than 325nm is largely achievable and that the size of the usable area of the actuator varies in size with the applied voltage.
机译：本文研究了将PMN-PT [001]压电致动器集成到智能微光机电系统（MOEMS）中的用途。与大多数压电材料不同，PMN-PT [001]可以产生大行程平面外位移。这是由于其非常高的纵向压电系数，高达4500pm / V。在介绍了MOEMS致动装置并简要介绍了可包括所研究的致动器的可重构自由空间微光学工作台（RFS-MoB）之后，提出了一种体积致动器。然后介绍了FEM仿真，突出了一些权衡：增加位移，减小尺寸，同时减小光学像差。已经观察到，对于具有小于800×800μm的表面和200μm的厚度的致动器，在很大程度上可以实现大于325nm的位移，并且致动器的可用区域的尺寸随施加的电压而变化。

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