首页> 外文会议>2014 International Symposium on Optomechatronic Technologies >An Iterative Actuator Calibration Method for Accurate N-Bucket Phase-Shifting in Phase Measuring Profilometry: Experiments
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An Iterative Actuator Calibration Method for Accurate N-Bucket Phase-Shifting in Phase Measuring Profilometry: Experiments

机译:一种用于相位测量轮廓仪中精确N桶相移的迭代执行器校准方法:实验

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摘要

A new calibration method of micro actuators used for N-bucket phase-shifting in phase measuring profilometry has been developed to overcome the errors introduced by nonlinear, irregular, or unknown phase-step increments of actuators. First an evaluation measure of fringe displacement error is proposed to detect and evaluate the phase-shifting of the interference fringe induced by stepwise movements of actuator. Second an iterative calibration method is proposed, which is based on the regulation control theory. For the evaluation and verification of the proposed simple calibration method comparing with conventional complex ones, a series of simulations and experiments is performed in various conditions, and the results are discussed in detail.
机译:已经开发了一种用于相位测量轮廓测量法中用于N型桶相移的微型执行器的新校准方法,以克服执行器的非线性,不规则或未知的相位步长增量所带来的误差。首先提出了一种条纹位移误差的评估措施,以检测和评估由执行器的步进运动引起的干涉条纹的相移。其次,提出了一种基于调节控制理论的迭代标定方法。为了评估和验证与传统复杂方法相比所提出的简单校准方法,在各种条件下进行了一系列模拟和实验,并对结果进行了详细讨论。

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