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首页> 外文会议>2014 International Symposium on Optomechatronic Technologies >Oblique Angle Artifact Reduction Using Wavelet-Based Filtering in Off-Centered Circular Geometry of Cone Beam Computed Tomography
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Oblique Angle Artifact Reduction Using Wavelet-Based Filtering in Off-Centered Circular Geometry of Cone Beam Computed Tomography

机译：锥束计算机断层扫描的偏心圆几何中基于小波滤波的斜角伪影减少

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摘要

A tomographic methodology for inspection of TSV (Through Silicon Via) process wafers is developed by utilizing an X-ray source. In conventional X-ray computed tomography (CT), the scanning axis of X-ray source and detector is approximately parallel to the long axis of the phantom and perpendicular to the plane of X-ray source. However, because TSV projection data are captured by angling the phantom bed relative to the plane of X-ray beam, the conventional CT geometry can not produce the visible projection images and results in a poorer resolution in TSV phantom. In such cases, an off-centered circular trajectory geometry of cone beam computed tomography (CBCT) is more effective. However, each projection is transversely truncated, bringing errors and artifacts in reconstruction. In this paper, the wavelet-based filtering as the adaptive denoising filter of compressed sensing (CS) enhancement is proposed for the off-centered circular trajectory scanning geometry. In the experiment, TSV imaging of nanofocus CT (nCT) is used to evaluate the accuracy and practicability of the proposed method, which is equipped with an off-centered flat panel detector. Results show that artifact enhancement is acceptable for practical use, and the image quality appears sufficient for specific diagnostic requirements. It provides a novel solution for wafer inspection CBCT system, in order to reduce the effect of oblique angle artifact.
机译：通过使用X射线源，开发了用于检查TSV（硅通孔）工艺晶圆的层析成像方法。在常规的X射线计算机断层摄影（CT）中，X射线源和检测器的扫描轴近似平行于体模的长轴并且垂直于X射线源的平面。但是，由于通过相对于X射线束平面倾斜体模床来捕获TSV投影数据，因此常规CT几何形状无法生成可见的投影图像，从而导致TSV体模的分辨率较差。在这种情况下，锥束计算机断层扫描（CBCT）的偏心圆轨迹几何形状更为有效。但是，每个投影都被横向截断，从而在重建中带来误差和伪影。在本文中，针对偏心圆轨迹扫描几何，提出了基于小波的滤波作为压缩感知（CS）增强的自适应降噪滤波器。在实验中，纳米聚焦CT（nCT）的TSV成像用于评估所提出方法的准确性和实用性，该方法配备了偏心平板检测器。结果表明，伪像增强对于实际使用是可以接受的，并且图像质量似乎足以满足特定的诊断要求。它为晶圆检测CBCT系统提供了一种新颖的解决方案，以减少斜角伪影的影响。

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