Symmetrical erosion patterns on single-crystal silicon cathodes after high-voltage vacuum breakdowns

机译：高压真空击穿后单晶硅阴极上的对称腐蚀图案

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We investigated the erosion traces which were forming on a surface of mono-crystalline silicon plates, which were used as cathodes of vacuum gaps. The plates had two surface orientations: 100 and 111. Single vacuum discharges were generated by short voltage pulses (10–80 ns, 200 kV) in gaps of 1–2 mm long. Each discharge leads to appearance a few symmetrical erosion patterns oriented along crystallographic directions. It is supposed that acoustoelectric and micro-plastic phenomena play an important role in figures formation.

机译：我们研究了在单晶硅板表面上形成的腐蚀痕迹，这些腐蚀痕迹被用作真空间隙的阴极。板的表面方向有两种：100和111。单真空放电是由短电压脉冲（10–80 ns，200 kV）在1-2 mm长的间隙中产生的。每次放电都会导致出现一些沿晶体学方向取向的对称腐蚀图案。据推测，声电和微塑性现象在图形形成中起着重要作用。

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来源
《2014 Tenth International Vacuum Electron Sources Conference》|2014年|1-2|共2页
会议地点 Saint-Petersburg(RU)
作者
Onischenko Sergey A.; Nefyodtsev Evgeny V.; Batrakov Alexander V.; Proskurovsky Dmitry I.;
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作者单位

Institute of High Current Electronics SB RAS, Tomsk, Russia, 634055, 2/3 Akademichesky Avenue;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Anodes; Cathodes; Discharges (electric); Etching; Silicon; Surface discharges; Vacuum breakdown;

机译：阳极；阴极;放电（电）；蚀刻；硅;表面放电；真空击穿；;

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3. High-Voltage 'Single-Crystal' Cathode Materials for Lithium-Ion Batteries [J] . Yinzhong Wang, Errui Wang, Xu Zhang, Energy & fuels . 2021,第3期

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4. Symmetrical erosion patterns on single-crystal silicon cathodes after high-voltage vacuum breakdowns [C] . Onischenko Sergey A., Nefyodtsev Evgeny V., Batrakov Alexander V., International Vacuum Electron Sources Conference . 2014

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5. Surface modification by filtered cathodic vacuum arc and nanomechanical properties of thin-film media, copper aluminum nickel shape-memory alloy, and surface-textured silicon. [D] . Zhang, Hanshen. 2009

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Symmetrical erosion patterns on single-crystal silicon cathodes after high-voltage vacuum breakdowns

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