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Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method

机译:使用AAO模板和原子层沉积法生长ZnO纳米线阵列

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摘要

In this study, we would show the details of a new fabricating process for the grown of the ZnO nano-wire arrays. The anodic aluminum oxide (AAO) was used as template and atomic-layer deposition (ALD) method was used to deposit ZnO thin films on AAO template. Because the ALD method can deposit the thin films with high aspect ratio, for that the ZnO particles are hoped to fill into the AAO tubes to form the ZnO nano-wires. The ZnO residual on the surfaces of AAO template was etched by using HCl solution (0.2328M or 0.1164M). The AAO template was removed by using NaOH solution (0.5M, 0.1M), then the ZnO nano-wire arrays were obtained.
机译:在这项研究中,我们将展示用于ZnO纳米线阵列生长的新制造工艺的细节。阳极氧化铝(AAO)用作模板,原子层沉积(ALD)方法用于在AAO模板上沉积ZnO薄膜。由于ALD法可以沉积高深宽比的薄膜,因此希望将ZnO颗粒填充到AAO管中以形成ZnO纳米线。通过使用HCl溶液(0.2328M或0.1164M)蚀刻AAO模板表面上的ZnO残留物。用NaOH溶液(0.5M,0.1M)去除AAO模板,得到ZnO纳米线阵列。

著录项

  • 来源
  • 会议地点 Okinawa(JP)
  • 作者单位

    Department of Chemical and Material Engineering, National University of Kaohsiung, Kaohsiung, Taiwan, ROC;

    Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan, R.O.C;

    Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan, R.O.C;

    Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan, R.O.C;

    Department of Chemical and Material Engineering, National University of Kaohsiung, Kaohsiung, Taiwan, ROC;

    Department of Electrical Engineering, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Decision support systems; Nanoscale devices;

    机译:决策支持系统;纳米尺度设备;

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