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首页> 外文会议>2016 International Conference on Microelectronics, Computing and Communications >Numerical study on displacement of dielectric film composed of array of differently shaped elements for capacitance based MEMS sensors
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Numerical study on displacement of dielectric film composed of array of differently shaped elements for capacitance based MEMS sensors

机译：基于电容传感器的MEMS传感器由不同形状的元件组成的介电膜位移的数值研究

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Sensitivity depends upon the fabrication process adopted and the effective displacement of the dielectric layer, particularly for the case of a capacitance based sensor. In this scenario, patterning of the dielectric is adopted at a mass level in order to fabricate highly sensitive sensors for robotics and biomedical sensing purpose (like electronic skin, etc.). In the present study, a numerical modelling is done using COMSOL software (academic version 5.1) to show the effect of patterning of the dielectric layer on its displacement while placing it between two plates of a capacitor. This is done by making an array of square, circle and pyramid shaped elements. Hence, a parametric study is done using load, size and type of element of the array as various parameters. Different combination of results is shown with the conclusion that pyramid-shaped elements based array gives maximum displacement followed by circle-shaped elements when compared with the solid filled and square shaped elements based array of the dielectric layer.
机译：灵敏度取决于所采用的制造工艺和介电层的有效位移，特别是对于基于电容的传感器而言。在这种情况下，为了形成用于机器人技术和生物医学传感目的的高度敏感的传感器（如电子皮肤等），应在整体上对电介质进行构图。在本研究中，使用COMSOL软件（学术版本5.1）进行了数值建模，以显示将介电层构图对其位移的影响，同时将其置于电容器的两个极板之间。这是通过制作正方形，圆形和金字塔形元素的数组来完成的。因此，使用数组的元素的负载，大小和类型作为各种参数来完成参数研究。结果的不同组合表明，与电介质层的基于实心填充和方形元素的阵列相比，基于金字塔形元素的阵列给出的位移最大，其次是圆形元素。

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