Optical CMOS sensor for angular measurements with readout electronics

机译：光学CMOS传感器，用于带读数电子设备的角度测量

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This paper presents an optical sensor for angular measurements to perform precise tracking of the sun's incident angle in a photovoltaic system. This microdevice was designed using a 0.18μm CMOS technology from TSMC. The microdevice is composed by a matrix of photodiodes and their respective readout electronics. A set of microstructures were used to resolve the angles of rotation by measuring the angle of incident light in the microdevice. These microstructures were fabricated on top of the photodiodes using the same CMOS process. Simulations and experimental setup showed the possibility of taking measurements from the angles between -60 to 60 degrees.

机译：本文提出了一种用于角度测量的光学传感器，可以对光伏系统中太阳的入射角进行精确跟踪。该微型器件是使用台积电的0.18μmCMOS技术设计的。微型设备由光电二极管矩阵及其各自的读出电子设备组成。一组微结构用于通过测量微型设备中入射光的角度来解析旋转角度。这些微结构是使用相同的CMOS工艺在光电二极管顶部制造的。仿真和实验设置表明可以从-60至60度之间的角度进行测量。

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来源
《2017 32nd Symposium on Microelectronics Technology and Devices》|2017年|1-4|共4页
会议地点 Fortaleza(BR)
作者
J. P. C. Costa; R. H. Gounella; T. C. Granado; R. T. Machado; Y. A. O. Assagra; J. H. Correia; J. P. Carmo;
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作者单位

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

CMEMS RD Centre, University of Minho, Campus Azurém, 4800-058, Guimarâes, Portugal;

Group of Metamaterials Microwaves and Optics, Av Trab Sao-Carlense, 13566-590, USP/Sâo Carlos-SP, Brazil;

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正文语种 eng
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关键词
Photodiodes; Current measurement; Metals; Photovoltaic cells; Dark current; Frequency measurement; Semiconductor device measurement;

机译：光电二极管;电流测量;金属;光伏电池;暗电流;频率测量;半导体器件测量;;

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1. Front-end electronics in a 65 nm CMOS process for high density readout of pixel sensors [J] . Luigi Gaioni, Massimo Manghisoni, Lodovico Ratti, Nuclear Instruments & Methods in Physics Research . 2011,第1期

机译：前端电子设备采用65 nm CMOS工艺，可高密度读取像素传感器
2. CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip [J] . G. Barillaro, P. Bruschi, F. Pieri, Physica Status Solidi. A, Applications and Materials Science . 2007,第5期

机译：与CMOS兼容的多孔硅气体传感器及其读出电子器件在同一芯片上的制造
3. Integration of an optical CMOS sensor with a microfluidic channel allows a sensitive readout for biological assays in point-of-care tests [J] . Van Dorst Bieke, Brivio Monica, Van der Sar Elfried, Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices . 2016,第Null期

机译：光学CMOS传感器与微流体通道集成在一起，可以在现场即时检测中灵敏读出用于生物检测
4. Optical CMOS sensor for angular measurements with readout electronics [C] . J. P. C. Costa, R. H. Gounella, T. C. Granado, Symposium on Microelectronics Technology and Devices . 2017

机译：具有读出电子器件的角度测量的光学CMOS传感器
5. MEMS angular rate and angular acceleration sensors with CMOS switched capacitor signal conditioning. [D] . O'Brien, Gary J. 2004

机译：具有CMOS开关电容器信号调理的MEMS角速度和角加速度传感器。
6. Monolithic CMOS sensor platform featuring an array of 9’216 carbon-nanotube-sensor elements and low-noise wide-bandwidth and wide-dynamic-range readout circuitry [O] . Alexandra Dudina, Florent Seichepine, Yihui Chen, -1

机译：单片CMOS传感器平台具有9216碳纳米管传感器元件阵列以及低噪声宽带和宽动态范围读出电路
7. Readout Electronics Scheme in CMOS Technology for Integration with Analog Outputs from Integrated Smart Sensors* [O] . A. Srivastava, S. V. Prasanna, K. Ajmera, 2008

机译：CMOS技术的读出电子方案，可与集成智能传感器的模拟输出集成*

Optical CMOS sensor for angular measurements with readout electronics

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