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Digital Moire based transient interferometry and its application in optical surface measurement

机译:基于数字莫尔干涉的瞬态干涉法及其在光学表面测量中的应用

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摘要

Digital Moire based transient interferometry (DMTI) is an effective non-contact testing methods for optical surfaces. In DMTI system, only one frame of real interferogram is experimentally captured for the transient measurement of the surface under test (SUT). When combined with partial compensation interferometry (PCI), DMTI is especially appropriate for the measurement of aspheres with large apertures, large asphericity or different surface parameters. Residual wavefront is allowed in PCI, so the same partial compensator can be applied to the detection of multiple SUTs. Excessive residual wavefront aberration results in spectrum aliasing, and the dynamic range of DMTI is limited. In order to solve this problem, a method based on wavelet transform is proposed to extract phase from the fringe pattern with spectrum aliasing. Results of simulation demonstrate the validity of this method. The dynamic range of Digital Moire technology is effectively expanded, which makes DMTI prospective in surface figure error measurement for intelligent fabrication of aspheric surfaces.
机译:基于数字莫尔条纹的瞬态干涉法(DMTI)是一种有效的光学表面非接触测试方法。在DMTI系统中,实验性地仅捕获一帧真实干涉图以用于被测表面(SUT)的瞬态测量。当与部分补偿干涉测量法(PCI)结合使用时,DMTI特别适用于测量大孔径,大非球面度或不同表面参数的非球面。 PCI中允许残留波前,因此可以将相同的部分补偿器应用于多个SUT的检测。过多的残留波前像差会导致频谱混叠,并且DMTI的动态范围受到限制。为了解决这个问题,提出了一种基于小波变换的条纹混叠法提取相位图的方法。仿真结果证明了该方法的有效性。有效地扩展了Digital Moire技术的动态范围,这使DMTI在用于智能制造非球面的表面图形误差测量中具有前瞻性。

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  • 来源
  • 会议地点 Beijing(CN)
  • 作者单位

    Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China;

    Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China;

    Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China;

    Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing, 100081, China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Digital Moire; optical surface measurement; wavelet transform; non-null interferometry;

    机译:数字云纹;光学表面测量小波变换非零干涉法;

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