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Laser writing with sub-nanosecond burst of femtosecond pulses using strain accumulation

机译:飞秒脉冲亚纳秒脉冲的激光写入,利用应变累积

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Summary form only given. Femtosecond laser direct writing and micromachining attract considerable interest for a variety of applications ranging from integrated optics and microfluidics to printable flat optics and multi-dimensional optical data storage. A regular train of femtosecond pulses generated by femtosecond oscillator or regenerative amplifier does commonly used in laser material processing. Micromachining with sub-microsecond bursts of femtosecond pulses has been applied for morphology control of structures generated via accumulation and regulation of a heat deposition [1, 2]. In addition to heating a pressure wave and rarefaction in the modified zone are important factors determining the laser induced structural changes [3]. However there is a lack of laser processing experiments with a burst exploiting accumulation of the rarefaction.Here we have proposed and demonstrated a method of efficient micromachining of silica glass and sapphire with the sub-nanosecond bursts of femtosecond pulses with decaying amplitudes in the burst. We show that the burst with the pulse separation interval in the range 50 - 2000 ps activates an additional mechanism of femtosecond modification based on simultaneous action of laser pulse and rarefaction or tensile strain, produced by cumulative action of previous laser pulses in the burst. Moreover temporal form of the burst minimizes electron-hole plasma region due to the first pulse intensity decreasing down to the threshold of multiphoton absorption. At the same time absorption of the subsequent pulses enhances density of energy deposition in comparison with the single pulse writing, that is the clamping effect originated from beam reflection from electron-hole plasma is reduced. As a result the nano-second burst produces the enhanced refractive index change and the birefringent structure in silica glass even with a single laser shot. Absorption of the second and following pulses in the burst is mainly controlled by transient color centers, and maximized for pulse separation interval in the range 200 - 2000 ps, but crucial role in modification enhancement belongs to the transient tensile strain accumulated by pulse repeating action (Fig.1a).
机译:仅提供摘要表格。飞秒激光直接写入和微加工在从集成光学和微流控技术到可打印的平面光学和多维光学数据存储等各种应用中引起了极大的兴趣。飞秒振荡器或再生放大器产生的常规飞秒脉冲序列确实在激光材料加工中常用。具有飞秒脉冲的亚微秒脉冲的微加工已被应用于通过累积和热沉积调节[1,2]生成的结构的形态控制。除了加热压力波和改性区的稀疏性,这些都是决定激光引起的结构变化的重要因素[3]。然而,缺乏利用稀有度积累进行猝发的激光加工实验,在此我们提出并证明了一种有效的微加工石英玻璃和蓝宝石的方法,该方法具有飞秒脉冲的亚纳秒猝发,且猝发幅度衰减。我们显示,脉冲间隔间隔在50-2000 ps范围内的脉冲,根据激光脉冲和稀疏或拉伸应变的同时作用,激活了飞秒修改的另一机制,该机制是由脉冲中先前激光脉冲的累积作用产生的。而且,由于第一脉冲强度下降到多光子吸收的阈值,因此突发的时间形式使电子空穴等离子体区域最小化。同时,与单脉冲写入相比,后续脉冲的吸收增强了能量沉积的密度,也就是说,来自电子空穴等离子体的束反射产生的钳位效应减小了。结果,即使是单次激光照射,纳秒破裂也会在石英玻璃中产生增强的折射率变化和双折射结构。突发中第二个和随后的脉冲的吸收主要由瞬态色心控制,并在200-2000 ps的范围内最大程度地增加了脉冲分离间隔,但在改性增强中的关键作用是由脉冲重复作用积累的瞬态拉伸应变(图1a)。

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