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An Improved 1T-DRAM Cell Using TiO2as the Source and Drain of an n-Channel PD-SOI MOSFET

机译:TiO 2 作为n沟道PD-SOI MOSFET的源漏的改进型1T-DRAM单元

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Due to fabrication challenges for the scaling of the capacitor of a conventional DRAM cell below 100 nm technology node, the concept of 1 T-DRAM cell[I] was proposed as an alternative. In all-Si 1T-DRAM cell, the body of an n-channel PD-SOI MOSFET is used as the storage node. The biggest drawback for all-Si 1 T-DRAM cell is it's low retention time which does not meet the ITRS specification (64 ms at 358 K) [2]. As a solution to this problem, we propose a novel capacitor-less 1 T-DRAM cell, where intrinsically n-type TiOn2n[3] is used as the sourceldrain material and silicon as the channel of an n-channel partially depleted SOI MOSFET. Large valance band offset between TiOn2nand Sin$(Delta E_{V}approx 2 eV)$nis utilized for storing larger number of excess holes in the body for a longer time than is possible with an all-Si 1T-DRAM cell. We report an improvement in retention time as well as sense margin at bothn$T=300 K$nandn$T=358 K$nfor our proposed DRAM cell through well calibrated TCAD simulations [4]. The extracted retention time for the proposed TiOn2nsource/drain 1T-DRAM cell is 3.5 s and 160 ms atn$T=300 K$nand 358n$K$nrespectively and for all-Si 1 T-DRAM cell, it is 1.5 ms andn$150 mu s$natn$T=300 K$nandn$T=358 K$nrespectively.
机译:由于在100 nm技术节点以下缩小传统DRAM单元电容器的制造难度,因此提出了1 T-DRAM单元[I]的概念作为替代方案。在全硅1T-DRAM单元中,n沟道PD-SOI MOSFET的本体用作存储节点。全Si 1 T-DRAM单元的最大缺点是保留时间短,不符合ITRS规范(358 K下为64 ms)[2]。为了解决这个问题,我们提出了一种新型的无电容器1 T-DRAM单元,其中本质上是n型TiOn 2 n [3]用作源漏材料,硅用作n沟道部分耗尽SOI MOSFET的沟道。 TiOn 2之间的价带大偏移 nand Sin $ (ΔE_{V}约2eV)·nis被用于比全Si 1T-DRAM单元更长的时间在体内存储大量多余的空穴。我们在n $ T = 300 K $ nandn $T=358 K $ texn,它通过经过良好校准的TCAD仿真[4]用于我们提出的DRAM单元。拟议的TiOn 2 nsource / drain 1T-DRAM单元在atn $T=300 K $ nand 358n $ K $ n分别对于全Si 1 T-DRAM单元为1.5 ms,n 150美元s $ natn $ T = 300 K $ nandn $ T = 358 K $ 分别。

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