Particle manipulation and removal using radiofrequency and resonant radiofrequency

机译：使用射频和共振射频进行粒子处理和去除

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This contribution describes a manipulator of particles, in the range nano, micrometer, suspended in plasma. The particles are repelled, attracted, stored and removed by the application of radiofrequency to electrodes in suitable position. The RF can be matched in frequency, amplitude and phase to the main RF in RF reactors. The manipulation effects are amplified when the electrode is driven in plasma sheath resonance or in complex-plasma sheath resonance. Selective manipulation of particles of different sizes and in different zones is possible.

机译：该贡献描述了悬浮在等离子体中的纳米级微米范围内的粒子操纵器。通过将射频施加到合适位置的电极上，可以排斥，吸引，存储和去除颗粒。射频可以在频率，幅度和相位上与射频电抗器中的主射频匹配。当以等离子鞘层共振或以复等离子鞘层共振驱动电极时，操纵效果被放大。选择性操纵不同尺寸和不同区域的颗粒是可能的。

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来源
《International Conference on Phenomena in Ionized Gases;ICPIG 2005》|2005年|p.1-2|共2页
会议地点 Eindhoven(NL);Eindhoven(NL)
作者
Beatrice M. Annaratone; G. E. Morfill;
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作者单位

Max-Planck Institut fuer Extraterrestrische Physik, Postfach 1312, D-85741, Garching, Germany;

rnMax-Planck Institut fuer Extraterrestrische Physik, Postfach 1312, D-85741, Garching, Germany;

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正文语种 eng
中图分类电磁学与无线电计量;
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Particle manipulation and removal using radiofrequency and resonant radiofrequency

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