Thickness dependency of the lubricity of Ag thin films deposited on Si(111)7 X 7 surface

机译：Si（111）7 X 7表面沉积的Ag薄膜的润滑性与厚度的关系

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Tribological properties of Ag films on Si (111) 7 X 7 surface having a wide range of thicknesses have been studied using a pin-on-plate type tribometer under ultrahigh vacuum (UHV) conditions. The coefficient of friction of thicker Ag films and Si (111) Ag-3~(1/2) x 3~(1/2) ordered surface show approximately 0.1, whereas the coefficient of friction of 0.4 - 8.4 nm thick Ag films is one order lower than that obtained from both the thicker Ag films and the Ag-3~(1/2) surface. Auger electron spectroscopy (AES) measurements show that the Ag MNN intensity ratio of the worn track surfaces to non-rubbed surfaces changes depending on the Ag thickness, and sub-nanometer thick films show the highest ratio. Reflection high-energy electron diffraction (RHEED) patterns show that the Ag film deposited on Si (111) 7 X 7 surface at room temperature forms a two-dimensional fiber crystal structure and gradually changes to a single crystal Ag film as the deposition progresses, whereas the films annealed at 500℃ form a 3~(1/2) x 3~(1/2) -R30 ° super-structure. The mechanism of the lubricity of the Ag film in the nanometer-thickness region is discussed in terms of the crystallographic structure of Ag depending on the film thickness.

机译：已经在超高真空（UHV）条件下使用针板式摩擦计研究了具有宽范围厚度的Si（111）7 X 7表面上的Ag膜的摩擦学性能。较厚的Ag膜和Si（111）Ag-3〜（1/2）x 3〜（1/2）有序表面的摩擦系数约为0.1，而0.4-8.4 nm厚的Ag膜的摩擦系数为比从较厚的Ag膜和Ag-3〜（1/2）表面获得的值低一个数量级。俄歇电子能谱（AES）测量表明，磨损的轨道表面与未摩擦的表面的Ag MNN强度比根据Ag厚度而变化，并且亚纳米厚膜显示出最高的比率。反射高能电子衍射（RHEED）图表明，室温下沉积在Si（111）7 X 7表面上的Ag膜形成二维纤维晶体结构，并随着沉积的进行逐渐变为单晶Ag膜， 500℃退火后的薄膜形成3〜（1/2）x 3〜（1/2）-R30°超结构。根据Ag的晶体结构，根据膜的厚度，讨论了在纳米厚度区域中Ag膜的润滑机理。

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《29th Leeds-Lyon Symposium on Tribology Sep 3-6, 2002 University of Leeds, UK》|2002年|p.133-140|共8页
会议地点 Leeds(GB)
作者
M. GOTO; T. YAMAMOTO; F. HONDA;
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Toyota Technological Institute, Hisakata 2-1-12, Nagoya 468, Japan;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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2. Characterization of Au thin films deposited on α-Sn(111)-(3 x 3)/InSb(111)A surfaces [J] . Y. Kasukabe, X. Zhao, S. Nishida, Journal of Crystal Growth . 2007,第Apr期

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3. Electronic properties and Fermi surface of Ag(111) films deposited onto H-passivated Si(111)-(1 X 1) surfaces - art. no. 075405 [J] . Arranz A., Sanchez-Royo JF., Avila J., Physical Review, B. Condensed Matter . 2002,第7期

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4. Thickness dependency of the lubricity of Ag thin films deposited on Si(111)7 X 7 surface [C] . M. GOTO, T. YAMAMOTO, F. HONDA, Leeds-Lyon Symposium on Tribology . 2003

机译：沉积在Si（111）7×7表面上沉积的Ag薄膜润滑性的厚度依赖性
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Thickness dependency of the lubricity of Ag thin films deposited on Si(111)7 X 7 surface

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