High-Rate Plasma Jet Machining for the Aspherization of Fused Silica Optics

机译：高速等离子流加工机用于熔融石英光学元件的球形化

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A high-rate plasma jet removal tool working at atmospheric pressure is used in the fabrication process of aspheres and free forms with large deformations. As examples the generation of a strongly curved concave piano-parabola and an off-axis piano-ellipse are presented starting from a piano-cylinder and a flat, respectively.

机译：在大气压下工作的高速等离子射流去除工具用于非球面和变形较大的自由形式的制造过程中。作为示例，分别从钢琴圆筒和平面开始，给出了强烈弯曲的凹形钢琴抛物线和离轴钢琴椭圆的产生。

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来源
《2nd EOS conference on manufacturing of optical components 2011》|2011年|p.10-11|共2页
会议地点 Munich(DE);Munich(DE)
作者
G. Boehm; T. Arnold; H. Paetzelt; A. Schindler;
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作者单位

Leibniz-Institute for Surface Modification, Leipzig, Permoserstr. 15, Germany;

Leibniz-Institute for Surface Modification, Leipzig, Permoserstr. 15, Germany;

Leibniz-Institute for Surface Modification, Leipzig, Permoserstr. 15, Germany;

Leibniz-Institute for Surface Modification, Leipzig, Permoserstr. 15, Germany;

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原文格式 PDF
正文语种 eng
中图分类光学仪器;
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1. Research on laser-induced damage resistance of fused silica optics by the fluid jet polishing method [J] . Lv Liang, Ma Ping, Huang Jinyong, Applied optics . 2016,第9期

机译：射流抛光法研究熔融石英光学元件的激光损伤抗性
2. New Process Simulation Procedure for High-Rate Plasma Jet Machining [J] . Johannes Meister, Thomas Arnold Plasma Chemistry and Plasma Processing . 2011,第1期

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3. Oxygen plasma etching of fused silica substrates for high power laser optics [J] . Abromavicius Giedrius, Juodagalvis Tomas, Buzelis Rytis, Applied Surface Science . 2018,第SEPa30期

机译：用于高功率激光光学器件的熔融石英基板的氧等离子体蚀刻
4. High-Rate Plasma Jet Machining for the Aspherization of Fused Silica Optics [C] . G. Boehm, T. Arnold, H. Paetzelt, EOS conference on manufacturing of optical components . 2011

机译：用于熔融石英光学的非球面的高速等离子体喷射加工
5. Development of a Thomson Scattering Diagnostic on a Pulsed Power Machine and Its Use in Studying Laboratory Plasma Jets Focusing on the Effect of Current Polarity [D] . Banasek, Jacob Thomas. 2019

机译：在脉冲动力机上开发汤姆森散射诊断及其在研究实验室射流对电流极性效果的研究
6. Ultraviolet Laser Damage Dependence on Contamination Concentration in Fused Silica Optics during Reactive Ion Etching Process [O] . Laixi Sun, Ting Shao, Zhaohua Shi, 2018

机译：反应离子刻蚀过程中紫外激光损伤对熔融石英光学器件中污染物浓度的影响
7. Interaction of ultrashort-laser pulses with induced undercritical plasmas in fused silica [O] . Gulley, Jeremy,, W. Winkler, Sebastian, Dennis, William,, 2012

机译：超短激光脉冲与熔融石英中感应临界等离子体的相互作用

High-Rate Plasma Jet Machining for the Aspherization of Fused Silica Optics

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