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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Precision goniometer system with indexing table and small angle measuring interferometer
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Precision goniometer system with indexing table and small angle measuring interferometer

机译：带有分度台和小角度测量干涉仪的精密测角仪系统

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摘要

Korea Research Institute of Standards and Science (KRISS) has built a goniometer combining an index table and a small angle generator. The index table divides a circle into 1440(0.25°) and the small angle generator divides 2° with a resolution of 0.002″. The integration of a small angle generating facility to the index table allows any 0.002″ increment to be generated. The small angle generator is based on the sine bar mechanism that angle is determined from the ratio of two lengths. The rotational angle is measured by a laser angle interferometer that detects the relative motion of two retro-reflectors attached to the rotating arm. The distance between two retro-reflectors is self-calibrated by an index table positioned on the rotating arm. The accuracy of the goniometer system is better than 0.11 second over full circle without calibration of the index table.
机译：韩国标准与科学研究院（KRISS）建造了一个结合了索引表和小角度发生器的测角仪。索引表将一个圆划分为1440（0.25°），小角度生成器将2°划分为0.002英寸的分辨率。小角度生成工具与索引表的集成允许生成任何0.002英寸的增量。小角度发生器基于正弦杆机制，该角度由两个长度的比率确定。旋转角由激光角干涉仪测量，该激光角干涉仪检测安装在旋转臂上的两个后向反射镜的相对运动。两个后向反射镜之间的距离由位于旋转臂上的分度台进行自我校准。无需对分度表进行校准，测角仪系统的精度在整个圆周上要优于0.11秒。

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