Ultra Precision CMM Aiming for the Ultimate Concept

机译：超精密三坐标测量机瞄准终极理念

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Based on very important principles of precision machine design, a new concept of a coordinate measuring machine (CMM) has been developed. The design aims for a high measuring repeatability, a high predictability of the machine response to the main error sources and the ability to reach a small geometric calibration uncertainty. The number of measuring systems is minimised to three and the geometric calibration involves only a single machine component. The estimated volumetric measuring uncertainty u_3 is about 25 nm.

机译：基于精密机器设计的非常重要的原理，已经开发了坐标测量机（CMM）的新概念。该设计旨在实现高测量重复性，机器对主要误差源的响应的高可预测性以及达到较小几何校准不确定性的能力。测量系统的数量减至最少三个，几何校准仅涉及单个机器组件。估计的体积测量不确定度u_3约为25 nm。

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来源
《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.234-237|共4页
会议地点 Turin(IT)
作者
T. Ruijl; J. Franse; J. van Eijk;
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作者单位

Vhilips CFT, Eindhoven, Netherlands;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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Ultra Precision CMM Aiming for the Ultimate Concept

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