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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Measurement of steep aspheres by curvature scanning: an uncertainty budget
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Measurement of steep aspheres by curvature scanning: an uncertainty budget

机译：通过曲率扫描测量陡峭的非球面：不确定性预算

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摘要

For the measurement of steep aspheres recently a particular measurement principle, called high-resolution large area curvature scanning (LACS), was proposed which focuses on the principles of traceability and avoidance of error influences and is intended for determining figure of steep aspheres and complex surfaces with ultra-precision. This method relies on direct measurement of curvature, is directly traced back to the base unit of length, does not rely on external form references, and has the advantage that the errors of the stages and whole-body movement of the artefact have only little influence on the uncertainty of measurement. An uncertainty budget will be presented for the LACS facility in comparison to interferometers and three-co-ordinate measuring machines. The principal or natural limits of a curvature measuring system for determination of topography will be discussed. A practical realisation is presented that is suitable also for high quality technical surfaces.
机译：为了测量陡峭的非球面，最近提出了一种特殊的测量原理，称为高分辨率大面积曲率扫描（LACS），该原理着眼于可追溯性和避免误差影响的原理，旨在确定陡峭的非球面和复杂表面的形状超精密。该方法依赖于曲率的直接测量，直接追溯到长度的基本单位，不依赖于外部形式参考，并且具有以下优点：阶段的误差和人工制品的整体运动几乎没有影响关于测量的不确定性。与干涉仪和三坐标测量机相比，将为LACS设备提供不确定性预算。将讨论用于确定地形的曲率测量系统的主要或自然极限。提出了一种适用于高质量技术表面的实用实现。

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