A metrological SPM for dimensional surface measurements

机译：用于尺寸表面测量的计量SPM

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摘要

A Scanning Probe Microscope (SPM) for quantitative measurements of critical dimensions, pitch and step-height of patterned surfaces, is described through the microscope structure, scanning devices and related control electronics. The error budget of the sample-scanning device together with the results of a comparison between SPM and diffractometric measurements are given and discussed.

机译：通过显微镜的结构，扫描装置和相关的控制电子设备，介绍了一种扫描探针显微镜（SPM），用于定量测量图案表面的关键尺寸，间距和台阶高度。给出并讨论了样品扫描设备的误差预算以及SPM和衍射测量之间的比较结果。

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来源
《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.402-405|共4页
会议地点 Turin(IT)
作者
G.B. Picotto; M. Pisani;
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作者单位

CNR -Istituto di Metrologia "G. Colonnetti" (IMGC), Torino, Italy;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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A metrological SPM for dimensional surface measurements

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