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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Assessment of interferometer-errors with the Virtual Interferometer
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Assessment of interferometer-errors with the Virtual Interferometer

机译：使用虚拟干涉仪评估干涉仪误差

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摘要

The knowledge of measurement uncertainties is an elementary requirement for the proper assessment of product-quality and for controlling production processes. Furthermore, the determination of measurement uncertainties is essential to ensure the comparability with other types of metrological instruments. Interferometers are amongst the most precise metrological instruments used by today's industry, but appropriate calibration techniques for interferometers have still not been established. It is extremely difficult to determine which errors occur in a certain real interferometer. A promising approach to a systematic investigation of errors in an interferometer and their effects on a specific measurement appears to be the simulation of interferometric measurements in a virtual environment. This paper touches upon some of the potential error sources that can be encountered in interferometry. Further, first results for a quantitative assessment of the interferometer-errors obtained with the Virtual Interferometer will be presented.
机译：测量不确定性的知识是正确评估产品质量和控制生产过程的基本要求。此外，确定测量不确定度对于确保与其他类型计量仪器的可比性至关重要。干涉仪是当今工业中使用的最精确的计量仪器，但仍未建立合适的干涉仪校准技术。要确定在特定的实际干涉仪中发生哪些错误是极其困难的。系统研究干涉仪中的误差及其对特定测量的影响的一种有前途的方法似乎是在虚拟环境中模拟干涉测量。本文介绍了干涉测量中可能遇到的一些潜在误差源。此外，将提供用于虚拟评估干涉仪误差的定量评估的第一结果。

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