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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >An attempt at micro cutting under different cutting environment using AFM
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An attempt at micro cutting under different cutting environment using AFM

机译：使用AFM在不同切割环境下进行微切割的尝试

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摘要

This paper describes an attempt at micro cutting under different cutting environment using Atomic Force Microscopy (AFM). The research goal is the analysis of cutting mechanism on the ultra precision cutting under the different cutting environment. The micro cutting for single crystal silicon and Aluminum under the various cutting environments such as dry, pure water and cooling air by using AFM was carried out. We have discussed about a relation with cutting forces, which compare with the Frictional Force Microscope (FFM) in various cutting. And also the observation of surface texture was carried out. It was found that the viscosity of cutting environment has great inference on micro cutting under the various cutting environment. It is important to discuss of micro tribology point of view.
机译：本文介绍了使用原子力显微镜（AFM）在不同切割环境下进行微切割的尝试。研究目的是分析不同切削环境下超精密切削的切削机理。使用AFM在干燥，纯净水和冷却空气等各种切割环境下对单晶硅和铝进行微切割。我们已经讨论了与切削力的关系，并在各种切削中将其与摩擦力显微镜（FFM）进行了比较。并且还进行了表面纹理的观察。发现在各种切削环境下切削环境的粘度对微切削具有很大的影响。讨论微观摩擦学的观点很重要。

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