Intercomparison of Scanning Probe Microscopes

机译：扫描探针显微镜的比对

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Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been fabricated and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a 2-dim lateral standard with a nominal pitch of 1 μm are reported.

机译：报告了参考标准的比较测量，共有13位使用不同仪器的合作伙伴参加了测量。测量使用了一组在欧洲项目中制造和校准的原型标准。在此，报告了在240 nm台阶高度标准品和标称节距为1μm的2-dim横向标准品上的测量结果。

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来源
《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.510-513|共4页
会议地点 Turin(IT)
作者
R. Breil; T. Fries; J. Garnaes; J. Haycocks; D. Hueser; J. Joergensen; W. Kautek; L. Koenders; N. Kofod; K.R. Koops; R. Korntner; B. Lindner; W. Mirande; A. Neubauer; J. Peltonen; G.B. Picotto; M. Pisani; H. Rothe; M. Sahre; M. Stedman; G. Wilkening;
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Omicron GmbH, Germany;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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2. Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe [J] . Jeremias Seppa, Virpi Korpelainen, Sten Bergstrand, Measurement Science & Technology . 2014,第4期

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3. Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope [J] . Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa, Measurement Science & Technology . 2003,第12期

机译：光学衍射，扫描电子显微镜和原子力显微镜之间的亚微米间距比较
4. Intercomparison of Scanning Probe Microscopes [C] . euspen European society for precision engineering and nanotechnology International Conference, european society for precision engineering and nanotechnology . 2001

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5. Probing microscopic properties of low-dimensional inorganic materials using scanning probe microscopes. [D] . Liu, Jie. 1996

机译：使用扫描探针显微镜探测低维无机材料的微观特性。
6. A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans [O] . Tobias Meier, Alexander Förste, Ali Tavassolizadeh, 2015

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7. Application and Progress in the Scanning Probe Microscopy. Development of Single Electron Devices Fabricated by Scanning Tunneling Microscope(STM)/Atomic Force Microscope(AFM). [O] . Jun-ichi SHIRAKASHI, Masami ISHII, Kazuhiko MATSUMOTO 1997

机译：扫描探针显微镜中的应用和进展。通过扫描隧穿显微镜（STM）/原子力显微镜（AFM）制造的单电子器件的研制。
8. Scanning Probe Lithography. 4. Effect of Scanning Tunneling Microscope TipParameters on Lithographic Patterns in Self-Assembling Monolayers [R] . Schoer, J. K., Crooks, R. M. 1996

机译：扫描探针光刻。扫描隧道显微镜Tipparameters对自组装单层光刻图案的影响

Intercomparison of Scanning Probe Microscopes

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