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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Micromachined chips for biomolecular investigation
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Micromachined chips for biomolecular investigation

机译：用于生物分子研究的微加工芯片

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摘要

The realisation of a matrix of separately driven electrodes, dedicated to biological analysis, is described. Silicon anisotropic etching and polyimide patterning are used for obtaining the analysis, inlet and outlet analyte reservoirs. Techniques as oxidation, metal evaporation, PE-CVD deposition and RIE have been used, as well as the e-beam direct writing, in order to pattern the matrix of gold electrodes. The insulating layers were thermally grown silicon dioxide and PECVD silicon nitride. Optical and SEM microscopy has been used for dimensional characterisation of the chip as well as electric measurements of the electrodes connections. Fluorescent DNA molecules driving experiment has been performed after mounting the device in dedicated LIF detection set-up.
机译：描述了专用于生物学分析的单独驱动的电极矩阵的实现。硅各向异性蚀刻和聚酰亚胺图案用于获得分析物，入口和出口分析物储层。为了图案化金电极的矩阵，已经使用了诸如氧化，金属蒸发，PE-CVD沉积和RIE以及电子束直接写入的技术。绝缘层是热生长的二氧化硅和PECVD氮化硅。光学和SEM显微镜已用于芯片的尺寸表征以及电极连接的电学测量。将设备安装在专用的LIF检测装置后，已经进行了荧光DNA分子驱动实验。

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