首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Design and implementation of an advanced dynamic probe calibrator for form measurement instruments
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Design and implementation of an advanced dynamic probe calibrator for form measurement instruments

机译:用于形状测量仪器的高级动态探头校准器的设计和实现

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摘要

A novel compact laser-interferometer based feeler calibration system is described. The system is equipped with a DSP controlled digital feedback-loop, which is capable to generate arbitrary wave-forms up to a frequency of 100 Hz and 20 μm peak-to-peak amplitude. The system can generate all necessary signals to simulate the rotary guide of a form measurement instrument and such enables the user to investigate the signal transmission chain without being disturbed by spindle errors or vibration.
机译:描述了一种新颖的基于紧凑型激光干涉仪的探头校准系统。该系统配备有DSP控制的数字反馈环路,该环路能够生成高达100 Hz的频率和20μm峰峰值的任意波形。该系统可以生成所有必要的信号,以模拟形状测量仪器的旋转导轨,从而使用户能够调查信号传输链,而不会受到主轴误差或振动的干扰。

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