The design and the realization of an H~+ FET sensor, integrated with its signal conditioning electronics, is presented. The chip points out the compatibility between ISFET fabrication technology and an on-chip CMNOS (Complementary Metal Nitride/Oxide Semiconductor) electronics. The chip consists of three sections, respectively devoted to test the electrochemical sensor characteristics, the signal conditioning stage performance and the CMNOS process parameter evaluation. The experimental testing, related to parameter extraction, represents with the simulation program BIOSPICE, a valid tool to improve the development of integrated sensor-based microsystems including arrays of sensors.
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