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STRUCTURAL AND ELECTROCHEMICAL STUDIES ON THIN-FILM YTTRIA-DOPED ZIRCONIA ELECTROLYTES FOR MICROSCALE SOLID OXIDE FUEL CELLS

机译:薄膜氧化钇掺杂的微细固体氧化物燃料电池用电解质的结构和电化学研究

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摘要

We report in-plane and through-plane conductivity measurements of dense YSZ films varying in thickness from 20 to 200 nm. In-plane measurements were performed on YSZ films grown on silicon wafers coated with SiO_2 or Si_3N_4. Micro-fabricated strips with Pt electrodes in various geometries were used to obtain conductivity as a function of temperature from 200 - 600 ℃ in a custom-designed micro-probe station. These films have activation energies, which vary from 0.77 to 1.09 eV. Their absolute conductivity is lower compared with other reports. Through-plane and fuel cell measurements were performed by depositing YSZ on a nitrided silicon wafer, then etching through the wafer and depositing porous platinum electrodes on both sides [6,7]. We discuss the electrochemical conduction studies in detail along with fuel cell performance and correlation with electrode microstructure.
机译:我们报告了厚度在20至200 nm之间变化的致密YSZ膜的面内和面内电导率测量结果。在生长在涂有SiO_2或Si_3N_4的硅片上的YSZ膜上进行面内测量。在定制设计的微探针站中,使用具有各种几何形状的Pt电极的微细加工条来获得电导率随温度变化的函数(200-600℃)。这些薄膜的活化能在0.77至1.09 eV之间。与其他报道相比,它们的绝对电导率更低。通过在氮化硅晶片上沉积YSZ,然后蚀刻穿过晶片并在两侧沉积多孔铂电极来进行贯穿平面和燃料电池的测量[6,7]。我们将详细讨论电化学传导研究以及燃料电池的性能以及与电极微结构的关系。

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