Metrology of freeform optics using diffractive null element in Shack-Hartmann sensor

机译：Shack-Hartmann传感器中使用衍射零元的自由形式光学的计量学

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The paper presents the testing of freeform optics using a Shack-Hartmann sensor. A cubic phase plate has been selected as a freeform surface to test. A diffractive optical element is used as a null element for the freeform optics. The experimental results using a Shack-Hartmann sensor are compared with other testing methods.

机译：本文介绍了使用Shack-Hartmann传感器对自由形式光学器件的测试。选择了立方相板作为自由曲面进行测试。衍射光学元件用作自由形式光学元件的零元件。使用Shack-Hartmann传感器的实验结果与其他测试方法进行了比较。

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《3rd EOS conference on manufacturing of optical components 2013》|2013年|34-35|共2页
会议地点 Munich(DE)
作者
G. S. Khan; M. Bichra; A. Grewe; N. Sabitov; K. Mantel; I. Harder; A. Berger; N. Lindlein; S. Sinzinger;
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Indian Institute of Technology Delhi, New Delhi, 110016, India;

Technische Universitaet Ilmenau, Fachgebiet Technische Optik, Ilmenau, 98684, Germany;

Technische Universitaet Ilmenau, Fachgebiet Technische Optik, Ilmenau, 98684, Germany;

Technische Universitaet Ilmenau, Fachgebiet Technische Optik, Ilmenau, 98684, Germany;

Max Planck Institute for the Science of Light, Erlangen, 91058, Germany;

Max Planck Institute for the Science of Light, Erlangen, 91058, Germany;

Friedrich-Alexander-Universitaet Erlangen-Nuernberg, Erlangen, 91058, Germany;

Friedrich-Alexander-Universitaet Erlangen-Nuernberg, Erlangen, 91058, Germany;

Technische Universitaet Ilmenau, Fachgebiet Technische Optik, Ilmenau, 98684, Germany;

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1. Adaptive interferometric null testing for unknown freeform optics metrology [J] . Huang Lei, Choi Heejoo, Zhao Wenchuan, Optics Letters . 2016,第23期

机译：适用于未知自由形式光学计量学的自适应干涉零测试
2. Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications [J] . Jeffrey A. Koch, Robert W. Presta, Richard A. Sacks Applied optics . 2000,第25期

机译：Shack-Hartmann传感器和相移干涉仪在大光学计量应用中的实验比较
3. Focal plane position detection with a diffractive optic for Shack-Hartmann wave-front sensor fabrication [J] . Justin D. Mansell, Eric K. Gustafson Applied optics . 2001,第7期

机译：用于Shack-Hartmann波前传感器制造的具有衍射光学元件的焦平面位置检测
4. Metrology of freeform optics using diffractive null element in Shack-Hartmann sensor [C] . G. S. Khan, M. Bichra, A. Grewe, EOS conference on manufacturing of optical components . 2013

机译：使用Shack-Hartmann传感器衍射空元件的自由形式光学元件的计量
5. A highly integrated surface plasmon resonance sensor based on a focusing diffractive optic element [D] . Khalid, Muhammad Zeeshan 2007

机译：基于聚焦衍射光学元件的高度集成的表面等离子体共振传感器
6. Shack-Hartmann wavefront-sensor-based adaptive optics system for multiphoton microscopy [O] . Jae Won Cha, Jerome Ballesta, Peter T.C. So 2010

机译：基于Shack-Hartmann波前传感器的多光子显微镜自适应光学系统
7. Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology [O] . R. R. Rammage, D. R. Neal, R. J. Copl, 2014

机译：shack-Hartmann波前传感技术在透射光学测量中的应用

Metrology of freeform optics using diffractive null element in Shack-Hartmann sensor

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