首页> 外文会议>3rd International Mesostructured Materials Symposium Jul 8-11, 2002 Jeju, Korea >A Possibility of Block-Copolymer Templated Mesoporous Silica Films Applied to Surface Photo Voltage (SPV) type NO_x Gas Sensor
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A Possibility of Block-Copolymer Templated Mesoporous Silica Films Applied to Surface Photo Voltage (SPV) type NO_x Gas Sensor

机译:用于表面光电压(SPV)型NO_x气体传感器的嵌段共聚物模板介孔二氧化硅膜的可能性

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摘要

A self-ordered hexagonal and cubic-like mesoporous silica film has been successfully fabricated from a Metal-Insulator-Semiconductor device applied to a Nitrogen oxides (NO_x) gas sensor based on the surface photo voltage system. These self-ordered mesoporous silica films are synthesized by using a nonionic triblock copolymer surfactant as a template in spin coating. The sensing characteristics as a NO_x gas sensor are dependent on both mesostructures and exposure gases.
机译:基于基于表面光电压系统的金属-绝缘体-半导体器件成功地应用于氮氧化物(NO_x)气体传感器,成功制作了自定序的六角形和立方状介孔二氧化硅膜。这些自排序的介孔二氧化硅膜是通过使用非离子型三嵌段共聚物表面活性剂作为旋涂中的模板来合成的。作为NO_x气体传感器的传感特性取决于介观结构和暴露气体。

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