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首页> 外文会议>The 3rd International Symposium on Material Chemistry in Nuclear Environment (Material Chemistry '02 MC'02) Mar 13-15, 2002 Tsukuba >SURFACE MODIFICATION OF CERAMIC MATERIALS INDUCED BY IRRADIATION OF HIGH POWER PULSED ICP
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SURFACE MODIFICATION OF CERAMIC MATERIALS INDUCED BY IRRADIATION OF HIGH POWER PULSED ICP

机译：大功率脉冲ICP辐照引起的陶瓷材料的表面改性

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摘要

Newly developed pulse-modulated high-power inductively coupled plasma [ICP] is expected to offer the unique physico-chemical condition, such as the increased concentration of chemically reactive species, as well as the appropriate heat flux for materials processing. Two kinds of oxide materials, titanium and zinc oxide, were placed at the downstream of Ar-H_2 ICP and irradiated in the plasma of continuous [CN] and pulse-modulated [PM] modes. The CN-ICP irradiation at the position close to the plasma tail gave rise to the thermal reduction of oxides. In the PM-ICP irradiation, the degree of thermal reduction depended on the lower power level during pulse-off time, as well as the total electric power. Irradiation in PM-ICP led to the increased formation of oxygen vacancies in titanium dioxide. In the case of zinc oxide, the UV emission efficiency was improved by PM-ICP irradiation, while the green emission became predominant by CN-ICP irradiation at the appropriate position. Induced effects in the two oxides by PM-ICP would be related to the high concentration of hydrogen radicals in the plasma.
机译：新开发的脉冲调制大功率电感耦合等离子体[ICP]有望提供独特的物理化学条件，例如化学反应性物质浓度的增加以及用于材料加工的适当热通量。将两种氧化物材料（钛和锌氧化物）置于Ar-H_2 ICP的下游，并以连续[CN]和脉冲调制[PM]模式的等离子体进行辐照。在靠近等离子体尾部的位置进行的CN-ICP照射引起了氧化物的热还原。在PM-ICP照射中，热还原的程度取决于脉冲关闭期间的较低功率水平以及总功率。 PM-ICP辐照导致二氧化钛中氧空位形成的增加。在氧化锌的情况下，通过PM-ICP辐照提高了UV发射效率，而绿色荧光在CN-ICP辐照的适当位置上占主导地位。 PM-ICP对两种氧化物的诱导效应与等离子体中氢自由基的高浓度有关。

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