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首页> 外文会议>3rd International Workshop on Structural Health Monitoring, Sep 12-14, 2001, Stanford University >Preparation of Texture Controlled Lead Zirconate Titanate Diaphragm Type Film Actuator
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Preparation of Texture Controlled Lead Zirconate Titanate Diaphragm Type Film Actuator

机译：织构控制锆钛酸铅膜片式薄膜执行机构的制备

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摘要

A diaphragm type (100) dominant oriented tetragonal phase lead zirconate titanate (PZT) film actuator is fabricated. The ferroelectric properties of the texture controlled PZT film is relatively good compared with other reported data and is comparable to those of bulk PZT ceramics. The displacement of the PZT film actuator driven at +- 20 V shows a butterfly like hysteresis. However, this butterfly shape shows opposite direction compared with the typical displacement curve of bulk PZT ceramics. This depressed displacement property of the PZT film appears to indicate bend motion in the vertical direction on the film surface since the film is not clamped, and it does not reflect the genuine piezoelectric property. For unipolar drive, the value of the displacement was about 220 nm at 20 V. The deflection amplitude of the diaphragm actuator showed a peak at 77.5 kHz. Therefore, it can be seen that the texture controlled PZT films is applicable to the film micro actuator.
机译：制造了一种隔膜型（100）主导取向的四方相锆钛酸铅（PZT）薄膜致动器。与其他报道的数据相比，纹理控制的PZT膜的铁电性能相对较好，并且可与块状PZT陶瓷相媲美。在20 V时驱动的PZT薄膜执行器的位移显示出蝶形的磁滞现象。但是，与块状PZT陶瓷的典型位移曲线相比，这种蝴蝶形状显示出相反的方向。 PZT膜的这种低下的位移性能似乎表明膜表面未在垂直方向上弯曲，因为该膜没有被夹紧，并且不能反映出真正的压电性能。对于单极驱动，位移值在20 V时约为220 nm。膜片致动器的偏转幅度在77.5 kHz处出现峰值。因此，可以看出，纹理控制的PZT膜适用于膜微致动器。

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