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首页> 外文会议>3rd International Workshop on Structural Health Monitoring, Sep 12-14, 2001, Stanford University >MEMS Based Corrosion and Stress Sensors for Non-Destructive Aircraft Evaluation
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MEMS Based Corrosion and Stress Sensors for Non-Destructive Aircraft Evaluation

机译：用于非破坏性飞机评估的基于MEMS的腐蚀和应力传感器

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摘要

A system utilizing multiple types of microsensors for monitoring corrosion, fatigue, and failure in high value structures is described. Non-destructive evaluation (NDE) techniques enabled through microelectromechanical systems (MEMS) sensor approaches allow monitoring of the occurrence and rate of corrosion under sealants, coated (painted) surfaces and other inaccessible areas. Using MEMS technology it is now possible to integrate and package sensors with associated CMOS control circuitry onto a single semiconductor chip. These sensors can provide information on the presence of stress, fatigue, corrosion, and micro-crack formation in structures being monitored. This combination of data provides critical assessment of structural health, leading to predictions of failure occurring. Two types of sensor devices will be discussed, along with results from specific applications.
机译：描述了一种利用多种类型的微传感器来监测高价值结构中的腐蚀，疲劳和故障的系统。通过微机电系统（MEMS）传感器方法实现的无损评估（NDE）技术可以监控密封胶，涂层（涂漆）表面和其他难以接近的区域下的腐蚀发生率和腐蚀速率。使用MEMS技术，现在可以将具有相关CMOS控制电路的传感器集成和封装到单个半导体芯片上。这些传感器可以提供有关受监视结构中应力，疲劳，腐蚀和微裂纹形成的信息。这些数据组合可对结构健康进行严格评估，从而可以预测发生的故障。将讨论两种类型的传感器设备，以及来自特定应用程序的结果。

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