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首页> 外文会议>4th International Conference on Nanochannels, Microchannels and Minichannels 2006(ICNMM2006) pt.B >DEVELOPMENT OF A SILICON-BASED PASSIVE GAS-LIQUID SEPARATION SYSTEM FOR MICROSACLE DIRECT METHANOL FUEL CELLS
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DEVELOPMENT OF A SILICON-BASED PASSIVE GAS-LIQUID SEPARATION SYSTEM FOR MICROSACLE DIRECT METHANOL FUEL CELLS

机译：基于硅的被动直接甲醇燃料电池气液分离系统的开发

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摘要

The design, fabrication, and performance characterization of a passive gas-liquid separation system is presented in this paper. The gas-liquid separation system is silicon-based and its fabrication is compatible with the existing CMU design of the microscale direct methanol fuel cell (DMFC). Both gas and liquid separators consist of staggered arrays of etched-through holes fabricated by deep reactive ion etching (DRIE). The gas separator is coated with a thin layer of hydrophobic polymer to substantiate the gas-liquid separation. To visually characterize the system performance, the gas-liquid separation system is made on a single wafer with a glass plate bonded on the top to form a separation chamber with a narrow gap in between. Benzocyclobutene (BCB) is applied for the low-temperature bonding. The maximum pressure for the liquid leakage of the gas separators is experimentally determined and compared with the values predicted theoretically. Several successful gas-liquid separations are observed at liquid pressures between 14.2 and 22.7 cmH_2O, liquid flow rates between 0.705 and 1.786 cc/min, and CO_2 flow rates between 0.15160 to 0.20435 cc/min.
机译：本文介绍了一种被动式气液分离系统的设计，制造和性能表征。气液分离系统是基于硅的，其制造与微型直接甲醇燃料电池（DMFC）的现有CMU设计兼容。气体和液体分离器都由通过深反应离子蚀刻（DRIE）制成的交错排列的蚀刻通孔阵列组成。气体分离器涂有一层疏水聚合物，以证实气液分离。为了从视觉上表征系统性能，将气液分离系统制作在单个晶圆上，并在其顶部粘合玻璃板，以形成分离室，其间的间隙很小。苯并环丁烯（BCB）用于低温粘合。实验确定了气体分离器液体泄漏的最大压力，并将其与理论上预测的值进行比较。在14.2至22.7 cmH_2O的液体压力，0.705至1.786 cc / min的液体流速以及0.15160至0.20435 cc / min的CO_2流速下观察到了几次成功的气液分离。

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