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首页> 外文会议>8th China international nanoscience and technology symposium >Practical Integrated Design of a Condenser-objective Lens for Transmission Electron Microscope
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Practical Integrated Design of a Condenser-objective Lens for Transmission Electron Microscope

机译：透射电子显微镜聚光镜的实用集成设计

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摘要

A condenser-objective lens is designed through combination of separating and integrating to consider the effect of the front condenser field on its objective performance. A practical lens model including magnetic pole piece, magnetic circuit and coil windings is built to optimize its rear field. The front field can be integrated into the rear one by simply adjusting the position of the specimen and the excitation on the condenser-objective lens. Optical performance of the integrated lens is researched as both a condenser lens and an imaging one. The total aberrations at the specimen plane are 0.01 nm under STEM operation mode and its spherical aberration coefficient is 1.5mm when being an imaging objective lens, which can meet for high resolution microanalysis and TEM imaging.
机译：通过分离和积分的组合设计聚光物镜，以考虑前聚光镜场对其物镜性能的影响。建立了包括磁极片，磁路和线圈绕组的实用镜头模型，以优化其后场。只需调节样品的位置和聚光镜上的激发光，就可以将前场整合到后场中。集成透镜的光学性能被研究为聚光透镜和成像透镜。在STEM操作模式下，样品平面上的总像差为0.01 nm，作为成像物镜时其球面像差系数为1.5mm，可以满足高分辨率微分析和TEM成像的要求。

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  • 来源
  • 会议地点 Xiangtan(CN);Xiangtan(CN)
  • 作者

    Li Wen-ping; Wu Jian; Zhou Zhen; Gui Li-jiang; Han Li;

  • 作者单位

    Beijing University of Aeronautics and Astronautics,Beijing 100191,P.R.China;

    Beijing University of Aeronautics and Astronautics,Beijing 100191,P.R.China;

    Beijing University of Aeronautics and Astronautics,Beijing 100191,P.R.China;

    Beijing University of Aeronautics and Astronautics,Beijing 100191,P.R.China;

    Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,P.R.China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 特种结构材料;
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