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首页> 外文会议>8th International conference on commercialization of micro and nano systems (COMS 2003) >CO-DESIGN OF MEMS/MST AND CMOS
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CO-DESIGN OF MEMS/MST AND CMOS

机译：MEMS / MST和CMOS的共同设计

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摘要

We will discuss the state of the art in Co-Design of MEMS (Micro-Electro-Mechanical-System) and electronic circuits. Different categories, levels or types of MEMS design tools (signal flow simulators, circuit simulators and partial differential equation solvers), allow for different interfacing possibilities between MEMS and electronic design tools. The top-down design methodology employing schematics and behavioral modeling and used as a standard for designing mixed-signal electronics is effective for MEMS design as well. For some cases of MEMS design the traditional methods of Finite Element Method or Boundary Element Method are required. In order to link the models of such custom MEMS devices, reduced-order models can be created by so called macro-model extraction. The most abstract level of MEMS design is the use of functional-level models and signal flow simulators. MEMS and electronic, co-design is essential for reducing product development time. The MEMS design methodology based on top-down design (schematic based MEMS design) is integrated into standard Synopsys and Cadence IC Design tools. It allows rapid convergence on optimal system design prior to more detailed "verification" of the sub-system blocks. The ability to capture device performance under different operating conditions can been extended to chip or package level testing, i.e. vibration tests, drop tests, noise response tests etc. Additionally and importantly, schematic based MEMS design would include effects of all manufacturing tolerances system behavior.
机译：我们将在MEMS（微机电系统）和电子电路的协同设计中讨论最新技术。 MEMS设计工具（信号流模拟器，电路模拟器和偏微分方程求解器）的不同类别，级别或类型允许MEMS与电子设计工具之间的接口可能性不同。自上而下的设计方法采用原理图和行为建模，并被用作设计混合信号电子产品的标准，对于MEMS设计同样有效。对于MEMS设计的某些情况，需要使用传统的有限元法或边界元法。为了链接这种定制MEMS器件的模型，可以通过所谓的宏模型提取来创建降阶模型。 MEMS设计的最抽象层次是功能层次模型和信号流模拟器的使用。 MEMS和电子协同设计对于缩短产品开发时间至关重要。基于自上而下设计（基于原理图的MEMS设计）的MEMS设计方法已集成到标准Synopsys和Cadence IC设计工具中。它允许在更详细的“验证”子系统块之前快速收敛于最佳系统设计。捕获器件在不同工作条件下的性能的能力可以扩展到芯片或封装级测试，即振动测试，跌落测试，噪声响应测试等。此外，重要的是，基于原理图的MEMS设计将包括所有制造公差系统行为的影响。

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