首页> 外文会议>IMID/IDMC/ASIA DISPLAY 2008;International display manufacturing conference 2008;International meeting on information display;Asia display 2008 >Characteristics of ITO electrode films grown on PET substrate by Roll-to-Roll Facing Target Sputtering system for flexible OLEDs
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Characteristics of ITO electrode films grown on PET substrate by Roll-to-Roll Facing Target Sputtering system for flexible OLEDs

机译:卷到卷面向靶溅射系统在柔性OLED上在PET基板上生长的ITO电极膜的特性

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摘要

We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.
机译:我们报告了使用特殊设计的卷对卷目标溅射(R2R FTS)系统在室温下无需常规冷却鼓的情况下在PET基板上生长的柔性ITO电极的电学和光学性质。由于有效地限制了ITO靶之间的高密度等离子体,我们可以在室温下无需冷却鼓的情况下生长出柔性的ITO电极。

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