首页> 外文会议>IMID/IDMC/ASIA DISPLAY 2008;International display manufacturing conference 2008;International meeting on information display;Asia display 2008 >Passivation of organic light emitting diodes with Al_2O_3/Ag/Al_2O_3 multilayer thin films grown by twin target sputtering system
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Passivation of organic light emitting diodes with Al_2O_3/Ag/Al_2O_3 multilayer thin films grown by twin target sputtering system

机译:双靶溅射系统生长的Al_2O_3 / Ag / Al_2O_3多层薄膜对有机发光二极管的钝化

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The characteristics of Al_2O_3/Ag/Al_2O_3 multilayer passivaton prepared by twin target sputtering (TTS) system for organic light emitting diodes. The Al_2O_3/Ag/Al_2O_3 multilayer thin film passivation on a PET substrate had a high transmittance of 86.44 % and low water vapor transmission rate (WVTR) of 0.011 g/m~2 -day due to the surface plasmon resonance (SPR) effect of Ag interlayer and effective multilayer structure for preventing the intrusion of water vapor. Using synchrotron x-ray scattering and field emission scanning electron microscope (FESEM) examinations, we investigated the growth behavior of Ag layer on the Al_2O_3 layer to explain the SPR effect of the Ag layer. This indicates that an Al_2O_3/Ag/Al_2O_3 multilayer passivation is a promising thin film passivation scheme for organic based flexible optoelectronics.
机译:通过双靶溅射(TTS)系统制备的有机发光二极管Al_2O_3 / Ag / Al_2O_3多层钝体的特性。 PET表面上的Al_2O_3 / Ag / Al_2O_3多层薄膜钝化具有高透射率86.44%和低水蒸气透过率(WVTR)0.011 g / m〜2天,这是由于表面等离子体共振(SPR)效应所致。银中间层和有效的多层结构,可防止水蒸气侵入。使用同步加速器X射线散射和场发射扫描电子显微镜(FESEM)检查,我们研究了Ag_2在Al_2O_3层上的生长行为,以解释Ag层的SPR效应。这表明Al_2O_3 / Ag / Al_2O_3多层钝化是一种用于有机柔性电子的有希望的薄膜钝化方案。

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