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首页> 外文会议>Advanced Biomedical and Clinical Diagnostic Systems IV; Progress in Biomedical Optics and Imaging; vol.7 no.3 >Packaging and Characteristics of a Micro Fluorescence Spectroscopy Analyzer
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Packaging and Characteristics of a Micro Fluorescence Spectroscopy Analyzer

机译：微型荧光光谱分析仪的包装和特性

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The overall objective this work is the development of a miniaturized fluorescence spectroscopy analyzer realized via microfabrication technology. Previously, we reported a MEMS micro grating actuated by a piezoelectric cantilever. For such device to be used in a spectroscopic system, optical characterization of the grating's efficiency and the system's stray light are required. We report here the characterization of the grating cantilever with a MEMS micro lens with the intention of fitting into a packaged micro spectroscopic system. This packaging is accomplished by multi-wafer (silicon) bonding of strategically aligned crystalline planes in order to form the basic geometry of a miniaturized spectroscopy setup. One of these crystalline planes, < 111 > of silicon, is used as a mirror for folding and compacting the optics at the specific angle of 54.74° (with wafer plane normal). The packaging, microlens, and grating cantilever are position in the designed geometry to accept a self-aligned fiber input from a flash lamp source. The microlens component is presented with beam profilometry of its focusing at a focal length of 7.7 mm. The diffraction is interrogated by a monochromator for quantifying the above said characteristics. The relative efficiency of the grating was 40-70% in the 400-600 nm range. Together these characterized components define the geometry and performance of our micro fluorescence spectroscopy system.
机译：这项工作的总体目标是开发一种通过微细加工技术实现的小型荧光光谱分析仪。以前，我们报道了由压电悬臂驱动的MEMS微光栅。对于在光谱系统中使用的这种装置，需要光栅效率和系统的杂散光的光学表征。我们在这里报告了MEMS微型透镜的光栅悬臂的特性，旨在适合于封装的显微光谱系统。这种封装是通过将战略对准的晶面进行多晶片（硅）键合来完成的，从而形成小型化光谱仪的基本几何形状。这些晶面之一，即硅的<111>，被用作反射镜，用于以54.74°的特定角度折叠（并压紧）光学元件（与晶片平面垂直）。包装，微透镜和光栅悬臂位于设计的几何形状中，以接受来自闪光灯光源的自对准光纤输入。微透镜组件通过聚焦在7.7 mm焦距的光束轮廓仪呈现。用单色仪询问衍射，以量化上述特征。光栅的相对效率在400-600 nm范围内为40-70％。这些特征化的组件共同定义了我们的微荧光光谱系统的几何形状和性能。

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