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MOEMS Pressure Sensors for Geothermal Well Monitoring

机译:用于地热井监测的MOEMS压力传感器

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The technology for enhanced geothermal systems (EGS), in which fractures connecting deep underground wells are deliberately formed through high pressure stimulation for energy generation, is projected to enormously expand the available reserves of geothermal energy in the U.S. EGS could provide up to 100,000 MWe within the U.S. by the next 50 years. Pressure measurements, in particular, are important for determining the state of the fluid, i.e., liquid or steam, the fluid flow, and the effectiveness of the well stimulation. However, it has been especially difficult to accurately measure pressure at temperatures above ~200℃ at a distance of 10 km below ground. MEMS technology has been employed for many years for extremely accurate pressure measurements through electrical readout of a MEMS fabricated resonator. By combining optical readout and drive at the end of a fiber optical cable with a MEMS resonator, it is possible to employ these highly accurate sensors within the harsh environment of a geothermal well. Sensor prototypes based on two beam and four beam resonator designs have been designed, fabricated and characterized for pressure response and accuracy. Resonant frequencies of the sensors vary between ~15 kHz and 90 kHz depending on sensor design, and laboratory measurements yielded sensitivities of frequency variation with external pressure of 0.9-2.2 Hz/psi. An opto-electronic feedback loop was designed and implemented for the field test. The sensors were packaged and deployed as part of a cable that was deployed at a geothermal well over the course of 21/2 weeks. Error of the sensor versus the reference gage was 1.2% over the duration of the test. There is a high likelihood that this error is a result of hydrogen darkening of the fiber that is reducing the temperature of the resonator and, if corrected, could reduce the error to less than 0.01%.
机译:增强地热系统技术(EGS)旨在通过高压增产蓄意形成连接深部地下井的裂缝,以产生能量,该技术预计将极大地扩展美国的地热能储量。EGS可以在其中提供100,000 MWe美国在未来50年内。特别地,压力测量对于确定流体(即,液体或蒸汽)的状态,流体流量以及井增产的有效性是重要的。但是,要准确测量高于200℃以上的温度,离地面10 km的距离尤其困难。 MEMS技术已被采用多年,用于通过MEMS制成的谐振器的电读数进行极其精确的压力测量。通过将光读出和光缆末端的驱动与MEMS谐振器相结合,可以在地热井的恶劣环境中采用这些高精度传感器。基于两束和四束谐振器设计的传感器原型已被设计,制造和表征,以实现压力响应和精度。传感器的谐振频率取决于传感器的设计,在〜15 kHz至90 kHz之间变化,实验室测量得出在外部压力为0.9-2.2 Hz / psi时频率变化的灵敏度。为现场测试设计并实现了一个光电反馈回路。传感器被打包并部署为电缆的一部分,该电缆在21/2周的时间内部署在地热井中。在测试期间,传感器相对于参考量规的误差为1.2%。此错误很有可能是由于光纤中的氢变黑而导致谐振器温度降低的结果,如果进行了修正,则可以将误差降低到小于0.01%。

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