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首页> 外文会议>Advanced fabrication technologies for microano optics and photonics VI >An improved wire grid polarizer for thermal infrared applications
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An improved wire grid polarizer for thermal infrared applications

机译：改进的线栅偏振器，用于热红外应用

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摘要

Moxtek has developed a high contrast IR polarizer on silicon suitable for long wavelength thermal IR applications using our aluminum nanowire, large area patterning capabilities. Between 7 and 15 microns, our 144 nm pitch polarizers transmit better than 70% of the passing polarization state and have a contrast ratio better than 40 dB. Transmission and reflectance measurements were made using a Fourier Transform Infrared (FTIR) spectrometer with instrument accuracy verified using silicon and germanium reference standards. Results were compared to RCWA modeling of the wire grid polarizer (WGP) performance on antireflection-coated wafers. The FTIR instrument noise floor limited the maximum contrast measurement to about 40 dB, but high polarizer contrast was verified at 10.6 μm using a CO_2 laser and pyroelectric detector. A continuous wave Gaussian beam from a CO_2 laser was used for Laser Damage Threshold (LDT) testing and showed LDT values of 110 kW/cm~2 and 10 kW/cm~2 in the blocking and passing states respectively. Analysis of laser damage threshold test samples shows the damage propagating from defects in the anti-reflection (AR) coating. Removing these AR coating defects should improve LDT performance and transmission in the thermal IR.
机译：Moxtek利用我们的铝纳米线，大面积构图功能，在硅上开发了一种适用于长波长热红外应用的高对比度红外偏振片。在7-14微米之间，我们的144 nm间距偏振器透射率优于通过的偏振状态的70％，对比率则优于40 dB。使用傅立叶变换红外（FTIR）光谱仪进行透射和反射率测量，仪器精度已使用硅和锗参考标准进行了验证。将结果与抗反射涂层晶圆上的线栅偏振器（WGP）性能的RCWA模型进行了比较。 FTIR仪器的本底噪声将最大对比度测量值限制在约40 dB，但使用CO_2激光和热释电检测器在10.6μm处验证了高偏振片对比度。来自CO_2激光器的连续波高斯光束用于激光损伤阈值（LDT）测试，在阻塞和通过状态下，LDT值分别为110 kW / cm〜2和10 kW / cm〜2。激光损伤阈值测试样品的分析显示，抗反射（AR）涂层中的缺陷会造成损伤。去除这些AR涂层缺陷应改善LDT性能和热红外传输。

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