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首页> 外文会议>Advanced fabrication technologies for microano optics and photonics VI >Inkjet printed micro lens array on patterned substrate
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Inkjet printed micro lens array on patterned substrate

机译：图案化基材上的喷墨印刷微透镜阵列

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摘要

Micro lens arrays (MLA) can be utilized in various applications of light sensitive devices such as digital cameras or objective free microscopes, and 3D imaging because of their good light collection efficiencies. Many of the fabrication methods used today require heat or expensive equipment or molds and that is why there is a need for a simple and cost effective fabrication method for MLAs. An inkjet printing based production method for low-cost micro lenses is presented here. By pre-patterning the used substrate the printing accuracy and the shape of the lenses is improved. The surface patterning is done with photolithography to fabricate round, shallow reservoirs for the lenses to be printed in. The liquid lens material is then inkjet printed into them. The pattern edges prevent the spreading of the ink outside the wanted area increasing the tolerance for printing inaccuracy and resulting to the uniform array of micro lenses. By depositing the ink to the reservoir, the ink forms a convex surface a.k.a. a lens. The used lens material is negative photoresist, so after printing it is cured with UV-light and baked in a hot plate to solidify the lens matrix. By placing different amount of ink in a reservoir the height of the lenses changes and thus the focus of the lens can be adjusted making the proposed method versatile tool for MLA fabrication.
机译：由于其良好的集光效率，微透镜阵列（MLA）可用于光敏设备（如数码相机或无物镜的显微镜）和3D成像的各种应用中。当今使用的许多制造方法都需要加热或昂贵的设备或模具，这就是为什么需要一种简单且经济高效的MLA制造方法的原因。本文介绍了一种基于喷墨印刷的低成本微透镜生产方法。通过对使用过的基板进行预构图，可以提高印刷精度和镜片形状。使用光刻技术对表面进行构图，以制造出圆形的，浅色的容器，以便将镜片印刷进去。然后将液体镜片材料喷墨印刷到其中。图案边缘可防止墨水扩散到所需区域之外，从而增加了打印不准确的容差，并导致了微透镜的均匀排列。通过将墨水沉积到容器中，墨水形成凸面，也称为透镜。所用的镜片材料是负性光刻胶，因此在印刷后，用紫外线将其固化，并在热板上烘烤以固化镜片基质。通过将不同量的墨水放置在容器中，可以改变镜片的高度，从而可以调整镜片的焦点，从而使所提出的方法成为制造MLA的通用工具。

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